Atomic Scale Manipulation of Grain Boundary Structures through Doping and In-Situ Gas Reduction
نویسندگان
چکیده
منابع مشابه
Grain boundary structures of atomic layer deposited
Grain boundary plays an important role in determining the physical properties and chemical stability of the materials. In particular, the structures of grain boundaries in atomic layer deposited TiN film may be one of the main factors to dominate the reliability and performance of ULSI devices with multilayer structure of Cu-based interconnects. In this work, the characteristics of grain bounda...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2013
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927613011720